11/16/2011	8:41:05 AM	Main Vac valve closed
11/16/2011	8:41:16 AM	BCl3 valve closed
11/16/2011	8:41:21 AM	Helium MFC set to  500.000000
11/16/2011	8:41:22 AM	Helium valve opened
11/16/2011	8:42:30 AM	Helium valve closed
11/16/2011	8:43:00 AM	Bypass valve opened
11/16/2011	8:43:39 AM	BCl3 MFC set to  20.000000
11/16/2011	8:43:43 AM	BCl3 valve opened
11/16/2011	8:48:17 AM	BCl3 MFC set to  20.000000
11/16/2011	9:08:01 AM	BCl3 valve closed
11/16/2011	9:08:08 AM	Bypass valve closed
11/16/2011	9:08:09 AM	Helium valve opened
11/16/2011	9:08:13 AM	Helium valve closed
11/16/2011	9:08:14 AM	Bypass valve opened
11/16/2011	9:09:47 AM	Bypass valve closed
11/16/2011	9:09:47 AM	Helium valve opened
11/16/2011	9:10:26 AM	Helium valve closed
11/16/2011	9:10:28 AM	Bypass valve opened
11/16/2011	9:10:28 AM	Bypass valve closed
11/16/2011	9:10:30 AM	Bypass valve opened
11/16/2011	9:12:48 AM	Bypass valve closed
11/16/2011	9:12:49 AM	Helium valve opened
11/16/2011	9:12:55 AM	Helium valve closed
11/16/2011	9:12:56 AM	Bypass valve opened
11/16/2011	9:14:06 AM	Bypass valve closed
11/16/2011	9:14:07 AM	Helium valve opened
11/16/2011	9:14:18 AM	Helium valve closed
11/16/2011	9:14:19 AM	Bypass valve opened
11/16/2011	9:48:18 AM	Bypass valve closed
11/16/2011	9:48:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	9:48:19 AM	Recipe started at 9:48 AM
11/16/2011	9:48:19 AM	Helium valve closed
11/16/2011	9:48:19 AM	H2 valve closed
11/16/2011	9:48:19 AM	BCl3 valve closed
11/16/2011	9:48:19 AM	PH3 valve closed
11/16/2011	9:48:19 AM	SiCl4 pre valve closed
11/16/2011	9:48:19 AM	SiCl4 post valve closed
11/16/2011	9:48:19 AM	Main Vac valve closed
11/16/2011	9:48:19 AM	Bypass valve closed
11/16/2011	9:48:19 AM	Bubbler valve closed
11/16/2011	9:48:19 AM	Helium MFC set to  0.000000
11/16/2011	9:48:19 AM	H2 MFC set to  0.000000
11/16/2011	9:48:19 AM	BCl3 MFC set to  0.000000
11/16/2011	9:48:19 AM	PHl3 MFC set to  0.000000
11/16/2011	9:48:19 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:48:19 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:48:20 AM	Tube furnace set to 0
11/16/2011	9:48:23 AM	H2 valve closed
11/16/2011	9:48:23 AM	BCl3 valve closed
11/16/2011	9:48:23 AM	PH3 valve closed
11/16/2011	9:48:23 AM	SiCl4 pre valve closed
11/16/2011	9:48:23 AM	SiCl4 post valve closed
11/16/2011	9:48:23 AM	Main Vac valve closed
11/16/2011	9:48:23 AM	Bypass valve closed
11/16/2011	9:48:23 AM	Bubbler valve closed
11/16/2011	9:48:23 AM	Helium valve opened
11/16/2011	9:48:23 AM	Helium MFC set to  500.000000
11/16/2011	9:48:23 AM	H2 MFC set to  0.000000
11/16/2011	9:48:23 AM	BCl3 MFC set to  0.000000
11/16/2011	9:48:23 AM	PHl3 MFC set to  0.000000
11/16/2011	9:48:23 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:48:23 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:48:23 AM	Tube furnace set to 0
11/16/2011	9:49:28 AM	Helium valve closed
11/16/2011	9:49:28 AM	H2 valve closed
11/16/2011	9:49:28 AM	BCl3 valve closed
11/16/2011	9:49:28 AM	PH3 valve closed
11/16/2011	9:49:28 AM	SiCl4 pre valve closed
11/16/2011	9:49:28 AM	SiCl4 post valve closed
11/16/2011	9:49:28 AM	Main Vac valve closed
11/16/2011	9:49:28 AM	Bypass valve closed
11/16/2011	9:49:28 AM	Bubbler valve closed
11/16/2011	9:49:28 AM	Helium MFC set to  0.000000
11/16/2011	9:49:28 AM	H2 MFC set to  0.000000
11/16/2011	9:49:28 AM	BCl3 MFC set to  0.000000
11/16/2011	9:49:28 AM	PHl3 MFC set to  0.000000
11/16/2011	9:49:28 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:49:28 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:49:29 AM	Tube furnace set to 0
11/16/2011	9:49:30 AM	Run finished at 9:49 AM
11/16/2011	9:49:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	9:53:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	9:53:31 AM	Recipe started at 9:53 AM
11/16/2011	9:53:31 AM	Helium valve closed
11/16/2011	9:53:31 AM	H2 valve closed
11/16/2011	9:53:31 AM	BCl3 valve closed
11/16/2011	9:53:31 AM	PH3 valve closed
11/16/2011	9:53:31 AM	SiCl4 pre valve closed
11/16/2011	9:53:31 AM	SiCl4 post valve closed
11/16/2011	9:53:31 AM	Main Vac valve closed
11/16/2011	9:53:31 AM	Bubbler valve closed
11/16/2011	9:53:31 AM	Bypass valve opened
11/16/2011	9:53:31 AM	Helium MFC set to  0.000000
11/16/2011	9:53:31 AM	H2 MFC set to  0.000000
11/16/2011	9:53:31 AM	BCl3 MFC set to  0.000000
11/16/2011	9:53:31 AM	PHl3 MFC set to  0.000000
11/16/2011	9:53:31 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:53:31 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:53:31 AM	Tube furnace set to 0
11/16/2011	9:54:41 AM	Helium valve closed
11/16/2011	9:54:41 AM	H2 valve closed
11/16/2011	9:54:41 AM	BCl3 valve closed
11/16/2011	9:54:41 AM	PH3 valve closed
11/16/2011	9:54:41 AM	SiCl4 pre valve closed
11/16/2011	9:54:41 AM	SiCl4 post valve closed
11/16/2011	9:54:41 AM	Main Vac valve closed
11/16/2011	9:54:41 AM	Bubbler valve closed
11/16/2011	9:54:41 AM	Bypass valve opened
11/16/2011	9:54:41 AM	Helium MFC set to  0.000000
11/16/2011	9:54:41 AM	H2 MFC set to  0.000000
11/16/2011	9:54:41 AM	BCl3 MFC set to  0.000000
11/16/2011	9:54:41 AM	PHl3 MFC set to  0.000000
11/16/2011	9:54:41 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:54:41 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:54:42 AM	Tube furnace set to 0
11/16/2011	9:55:42 AM	Helium valve closed
11/16/2011	9:55:42 AM	H2 valve closed
11/16/2011	9:55:42 AM	BCl3 valve closed
11/16/2011	9:55:42 AM	PH3 valve closed
11/16/2011	9:55:42 AM	SiCl4 pre valve closed
11/16/2011	9:55:42 AM	SiCl4 post valve closed
11/16/2011	9:55:42 AM	Bypass valve closed
11/16/2011	9:55:42 AM	Bubbler valve closed
11/16/2011	9:55:42 AM	Main Vac valve opened
11/16/2011	9:55:42 AM	Helium MFC set to  0.000000
11/16/2011	9:55:42 AM	H2 MFC set to  0.000000
11/16/2011	9:55:42 AM	BCl3 MFC set to  0.000000
11/16/2011	9:55:42 AM	PHl3 MFC set to  0.000000
11/16/2011	9:55:42 AM	SiCl4 MFC set to  0.000000
11/16/2011	9:55:42 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:55:42 AM	Tube furnace set to 0
11/16/2011	9:55:43 AM	Run finished at 9:55 AM
11/16/2011	9:55:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	10:04:16 AM	Helium MFC set to  20.000000
11/16/2011	10:04:22 AM	Helium valve opened
11/16/2011	10:04:25 AM	Tube furnace set to 50
11/16/2011	10:10:28 AM	Helium valve closed
11/16/2011	10:15:00 AM	Helium valve opened
11/16/2011	10:18:22 AM	Helium valve closed
11/16/2011	10:29:23 AM	Main Vac valve closed
11/16/2011	10:29:58 AM	Main Vac valve opened
11/16/2011	10:30:57 AM	Recipe started at 10:30 AM
11/16/2011	10:30:57 AM	Helium valve closed
11/16/2011	10:30:57 AM	H2 valve closed
11/16/2011	10:30:57 AM	BCl3 valve closed
11/16/2011	10:30:57 AM	PH3 valve closed
11/16/2011	10:30:57 AM	SiCl4 pre valve closed
11/16/2011	10:30:57 AM	SiCl4 post valve closed
11/16/2011	10:30:57 AM	Main Vac valve closed
11/16/2011	10:30:57 AM	Bypass valve closed
11/16/2011	10:30:57 AM	Bubbler valve closed
11/16/2011	10:30:57 AM	Helium MFC set to  0.000000
11/16/2011	10:30:57 AM	H2 MFC set to  0.000000
11/16/2011	10:30:57 AM	BCl3 MFC set to  0.000000
11/16/2011	10:30:57 AM	PHl3 MFC set to  0.000000
11/16/2011	10:30:57 AM	SiCl4 MFC set to  0.000000
11/16/2011	10:30:57 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:30:57 AM	Tube furnace set to 0
11/16/2011	10:31:00 AM	Helium valve closed
11/16/2011	10:31:00 AM	BCl3 valve closed
11/16/2011	10:31:00 AM	PH3 valve closed
11/16/2011	10:31:00 AM	SiCl4 pre valve closed
11/16/2011	10:31:00 AM	SiCl4 post valve closed
11/16/2011	10:31:00 AM	Main Vac valve closed
11/16/2011	10:31:00 AM	Bypass valve closed
11/16/2011	10:31:00 AM	Bubbler valve closed
11/16/2011	10:31:00 AM	H2 valve opened
11/16/2011	10:31:00 AM	Helium MFC set to  0.000000
11/16/2011	10:31:00 AM	H2 MFC set to  500.000000
11/16/2011	10:31:00 AM	BCl3 MFC set to  0.000000
11/16/2011	10:31:00 AM	PHl3 MFC set to  0.000000
11/16/2011	10:31:00 AM	SiCl4 MFC set to  0.000000
11/16/2011	10:31:00 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:31:00 AM	Tube furnace set to 0
11/16/2011	10:32:07 AM	Helium valve closed
11/16/2011	10:32:07 AM	BCl3 valve closed
11/16/2011	10:32:07 AM	PH3 valve closed
11/16/2011	10:32:07 AM	SiCl4 pre valve closed
11/16/2011	10:32:07 AM	SiCl4 post valve closed
11/16/2011	10:32:07 AM	Main Vac valve closed
11/16/2011	10:32:07 AM	Bypass valve closed
11/16/2011	10:32:07 AM	H2 valve opened
11/16/2011	10:32:07 AM	Bubbler valve opened
11/16/2011	10:32:07 AM	Helium MFC set to  0.000000
11/16/2011	10:32:07 AM	H2 MFC set to  500.000000
11/16/2011	10:32:07 AM	BCl3 MFC set to  0.000000
11/16/2011	10:32:07 AM	PHl3 MFC set to  0.000000
11/16/2011	10:32:07 AM	SiCl4 MFC set to  0.000000
11/16/2011	10:32:07 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:32:07 AM	Tube furnace set to 0
11/16/2011	10:32:08 AM	Helium valve closed
11/16/2011	10:32:08 AM	BCl3 valve closed
11/16/2011	10:32:08 AM	PH3 valve closed
11/16/2011	10:32:08 AM	SiCl4 pre valve closed
11/16/2011	10:32:08 AM	SiCl4 post valve closed
11/16/2011	10:32:08 AM	Main Vac valve closed
11/16/2011	10:32:08 AM	Bypass valve closed
11/16/2011	10:32:08 AM	H2 valve opened
11/16/2011	10:32:08 AM	Bubbler valve opened
11/16/2011	10:32:08 AM	Helium MFC set to  0.000000
11/16/2011	10:32:08 AM	H2 MFC set to  450.000000
11/16/2011	10:32:08 AM	BCl3 MFC set to  0.000000
11/16/2011	10:32:08 AM	PHl3 MFC set to  0.000000
11/16/2011	10:32:08 AM	SiCl4 MFC set to  0.000000
11/16/2011	10:32:08 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:32:08 AM	Tube furnace set to 1000
11/16/2011	10:54:08 AM	Helium valve closed
11/16/2011	10:54:08 AM	PH3 valve closed
11/16/2011	10:54:08 AM	Main Vac valve closed
11/16/2011	10:54:08 AM	Bypass valve closed
11/16/2011	10:54:08 AM	H2 valve opened
11/16/2011	10:54:08 AM	BCl3 valve opened
11/16/2011	10:54:08 AM	SiCl4 pre valve opened
11/16/2011	10:54:08 AM	SiCl4 post valve opened
11/16/2011	10:54:08 AM	Bubbler valve opened
11/16/2011	10:54:08 AM	Helium MFC set to  0.000000
11/16/2011	10:54:08 AM	H2 MFC set to  500.000000
11/16/2011	10:54:08 AM	BCl3 MFC set to  1.000000
11/16/2011	10:54:08 AM	PHl3 MFC set to  0.000000
11/16/2011	10:54:08 AM	SiCl4 MFC set to  25.000000
11/16/2011	10:54:08 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:54:08 AM	Tube furnace set to 1000
11/16/2011	10:54:23 AM	Helium valve closed
11/16/2011	10:54:23 AM	BCl3 valve closed
11/16/2011	10:54:23 AM	PH3 valve closed
11/16/2011	10:54:23 AM	SiCl4 pre valve closed
11/16/2011	10:54:23 AM	SiCl4 post valve closed
11/16/2011	10:54:23 AM	Main Vac valve closed
11/16/2011	10:54:23 AM	Bypass valve closed
11/16/2011	10:54:23 AM	H2 valve opened
11/16/2011	10:54:23 AM	Bubbler valve opened
11/16/2011	10:54:23 AM	Helium MFC set to  0.000000
11/16/2011	10:54:23 AM	H2 MFC set to  500.000000
11/16/2011	10:54:23 AM	BCl3 MFC set to  0.000000
11/16/2011	10:54:23 AM	PHl3 MFC set to  0.000000
11/16/2011	10:54:23 AM	SiCl4 MFC set to  0.000000
11/16/2011	10:54:23 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:54:23 AM	Tube furnace set to 750
11/16/2011	11:03:05 AM	H2 valve closed
11/16/2011	11:03:05 AM	BCl3 valve closed
11/16/2011	11:03:05 AM	PH3 valve closed
11/16/2011	11:03:05 AM	SiCl4 pre valve closed
11/16/2011	11:03:05 AM	SiCl4 post valve closed
11/16/2011	11:03:05 AM	Main Vac valve closed
11/16/2011	11:03:05 AM	Bypass valve closed
11/16/2011	11:03:05 AM	Helium valve opened
11/16/2011	11:03:05 AM	Bubbler valve opened
11/16/2011	11:03:05 AM	Helium MFC set to  400.000000
11/16/2011	11:03:05 AM	H2 MFC set to  0.000000
11/16/2011	11:03:05 AM	BCl3 MFC set to  0.000000
11/16/2011	11:03:05 AM	PHl3 MFC set to  0.000000
11/16/2011	11:03:05 AM	SiCl4 MFC set to  0.000000
11/16/2011	11:03:05 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:03:06 AM	Tube furnace set to 0
11/16/2011	11:18:14 AM	Helium valve closed
11/16/2011	11:18:14 AM	H2 valve closed
11/16/2011	11:18:14 AM	BCl3 valve closed
11/16/2011	11:18:14 AM	PH3 valve closed
11/16/2011	11:18:14 AM	SiCl4 pre valve closed
11/16/2011	11:18:14 AM	SiCl4 post valve closed
11/16/2011	11:18:14 AM	Main Vac valve closed
11/16/2011	11:18:14 AM	Bypass valve closed
11/16/2011	11:18:14 AM	Bubbler valve closed
11/16/2011	11:18:14 AM	Helium MFC set to  0.000000
11/16/2011	11:18:14 AM	H2 MFC set to  0.000000
11/16/2011	11:18:14 AM	BCl3 MFC set to  0.000000
11/16/2011	11:18:14 AM	PHl3 MFC set to  0.000000
11/16/2011	11:18:14 AM	SiCl4 MFC set to  0.000000
11/16/2011	11:18:14 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:18:14 AM	Tube furnace set to 0
11/16/2011	11:18:15 AM	Run finished at 11:18 AM
11/16/2011	11:18:22 AM	Bypass valve opened
11/16/2011	11:18:25 AM	Bypass valve closed
11/16/2011	11:18:27 AM	Helium valve opened
11/16/2011	11:18:48 AM	Helium valve closed
11/16/2011	11:18:52 AM	Helium MFC set to  500.000000
11/16/2011	11:18:52 AM	Helium valve opened
11/16/2011	11:19:29 AM	Helium valve closed
11/16/2011	11:19:34 AM	Helium MFC set to  0.000000
11/16/2011	11:22:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	11:22:57 AM	Recipe started at 11:22 AM
11/16/2011	11:22:57 AM	Helium valve closed
11/16/2011	11:22:57 AM	H2 valve closed
11/16/2011	11:22:57 AM	BCl3 valve closed
11/16/2011	11:22:57 AM	PH3 valve closed
11/16/2011	11:22:57 AM	SiCl4 pre valve closed
11/16/2011	11:22:57 AM	SiCl4 post valve closed
11/16/2011	11:22:57 AM	Main Vac valve closed
11/16/2011	11:22:57 AM	Bubbler valve closed
11/16/2011	11:22:57 AM	Bypass valve opened
11/16/2011	11:22:57 AM	Helium MFC set to  0.000000
11/16/2011	11:22:57 AM	H2 MFC set to  0.000000
11/16/2011	11:22:57 AM	BCl3 MFC set to  0.000000
11/16/2011	11:22:57 AM	PHl3 MFC set to  0.000000
11/16/2011	11:22:57 AM	SiCl4 MFC set to  0.000000
11/16/2011	11:22:57 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:22:57 AM	Tube furnace set to 0
11/16/2011	11:24:31 AM	Helium valve closed
11/16/2011	11:24:31 AM	H2 valve closed
11/16/2011	11:24:31 AM	BCl3 valve closed
11/16/2011	11:24:31 AM	PH3 valve closed
11/16/2011	11:24:31 AM	SiCl4 pre valve closed
11/16/2011	11:24:31 AM	SiCl4 post valve closed
11/16/2011	11:24:31 AM	Main Vac valve closed
11/16/2011	11:24:31 AM	Bubbler valve closed
11/16/2011	11:24:31 AM	Bypass valve opened
11/16/2011	11:24:31 AM	Helium MFC set to  0.000000
11/16/2011	11:24:31 AM	H2 MFC set to  0.000000
11/16/2011	11:24:31 AM	BCl3 MFC set to  0.000000
11/16/2011	11:24:31 AM	PHl3 MFC set to  0.000000
11/16/2011	11:24:31 AM	SiCl4 MFC set to  0.000000
11/16/2011	11:24:31 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:24:31 AM	Tube furnace set to 0
11/16/2011	11:25:31 AM	Helium valve closed
11/16/2011	11:25:31 AM	H2 valve closed
11/16/2011	11:25:31 AM	BCl3 valve closed
11/16/2011	11:25:31 AM	PH3 valve closed
11/16/2011	11:25:31 AM	SiCl4 pre valve closed
11/16/2011	11:25:31 AM	SiCl4 post valve closed
11/16/2011	11:25:31 AM	Bypass valve closed
11/16/2011	11:25:31 AM	Bubbler valve closed
11/16/2011	11:25:31 AM	Main Vac valve opened
11/16/2011	11:25:31 AM	Helium MFC set to  0.000000
11/16/2011	11:25:31 AM	H2 MFC set to  0.000000
11/16/2011	11:25:31 AM	BCl3 MFC set to  0.000000
11/16/2011	11:25:31 AM	PHl3 MFC set to  0.000000
11/16/2011	11:25:31 AM	SiCl4 MFC set to  0.000000
11/16/2011	11:25:31 AM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:25:31 AM	Tube furnace set to 0
11/16/2011	11:25:32 AM	Run finished at 11:25 AM
11/16/2011	11:25:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	11:49:23 AM	Helium MFC set to  20.000000
11/16/2011	11:49:34 AM	Helium valve opened
11/16/2011	11:52:27 AM	Helium valve closed
11/16/2011	12:06:52 PM	Main Vac valve closed
11/16/2011	12:06:55 PM	Helium MFC set to  0.000000
11/16/2011	12:07:28 PM	Main Vac valve opened
11/16/2011	12:07:33 PM	Helium MFC set to  20.000000
11/16/2011	12:07:34 PM	Helium valve opened
11/16/2011	12:08:22 PM	Helium valve closed
11/16/2011	12:08:25 PM	Helium MFC set to  0.000000
11/16/2011	12:09:00 PM	Main Vac valve closed
11/16/2011	12:09:23 PM	Main Vac valve opened
11/16/2011	12:10:22 PM	Tube furnace set to 50
11/16/2011	12:10:51 PM	Main Vac valve closed
11/16/2011	12:11:05 PM	Main Vac valve opened
11/16/2011	12:11:55 PM	Helium MFC set to  20.000000
11/16/2011	12:11:56 PM	Helium valve opened
11/16/2011	12:12:24 PM	Helium valve closed
11/16/2011	12:12:27 PM	Helium MFC set to  0.000000
11/16/2011	12:18:26 PM	Main Vac valve closed
11/16/2011	12:18:58 PM	Main Vac valve opened
11/16/2011	12:20:24 PM	Main Vac valve closed
11/16/2011	12:20:38 PM	Main Vac valve opened
11/16/2011	12:21:10 PM	Recipe started at 12:21 PM
11/16/2011	12:21:10 PM	Helium valve closed
11/16/2011	12:21:10 PM	H2 valve closed
11/16/2011	12:21:10 PM	BCl3 valve closed
11/16/2011	12:21:10 PM	PH3 valve closed
11/16/2011	12:21:10 PM	SiCl4 pre valve closed
11/16/2011	12:21:10 PM	SiCl4 post valve closed
11/16/2011	12:21:10 PM	Main Vac valve closed
11/16/2011	12:21:10 PM	Bypass valve closed
11/16/2011	12:21:10 PM	Bubbler valve closed
11/16/2011	12:21:10 PM	Helium MFC set to  0.000000
11/16/2011	12:21:10 PM	H2 MFC set to  0.000000
11/16/2011	12:21:10 PM	BCl3 MFC set to  0.000000
11/16/2011	12:21:10 PM	PHl3 MFC set to  0.000000
11/16/2011	12:21:10 PM	SiCl4 MFC set to  0.000000
11/16/2011	12:21:10 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	12:21:10 PM	Tube furnace set to 0
11/16/2011	12:21:13 PM	Helium valve closed
11/16/2011	12:21:13 PM	BCl3 valve closed
11/16/2011	12:21:13 PM	PH3 valve closed
11/16/2011	12:21:13 PM	SiCl4 pre valve closed
11/16/2011	12:21:13 PM	SiCl4 post valve closed
11/16/2011	12:21:13 PM	Main Vac valve closed
11/16/2011	12:21:13 PM	Bypass valve closed
11/16/2011	12:21:13 PM	Bubbler valve closed
11/16/2011	12:21:13 PM	H2 valve opened
11/16/2011	12:21:13 PM	Helium MFC set to  0.000000
11/16/2011	12:21:13 PM	H2 MFC set to  500.000000
11/16/2011	12:21:13 PM	BCl3 MFC set to  0.000000
11/16/2011	12:21:13 PM	PHl3 MFC set to  0.000000
11/16/2011	12:21:13 PM	SiCl4 MFC set to  0.000000
11/16/2011	12:21:13 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	12:21:13 PM	Tube furnace set to 50
11/16/2011	12:22:19 PM	Helium valve closed
11/16/2011	12:22:19 PM	BCl3 valve closed
11/16/2011	12:22:19 PM	PH3 valve closed
11/16/2011	12:22:19 PM	SiCl4 pre valve closed
11/16/2011	12:22:19 PM	SiCl4 post valve closed
11/16/2011	12:22:19 PM	Main Vac valve closed
11/16/2011	12:22:19 PM	Bypass valve closed
11/16/2011	12:22:19 PM	H2 valve opened
11/16/2011	12:22:19 PM	Bubbler valve opened
11/16/2011	12:22:19 PM	Helium MFC set to  0.000000
11/16/2011	12:22:19 PM	H2 MFC set to  500.000000
11/16/2011	12:22:19 PM	BCl3 MFC set to  0.000000
11/16/2011	12:22:19 PM	PHl3 MFC set to  0.000000
11/16/2011	12:22:19 PM	SiCl4 MFC set to  0.000000
11/16/2011	12:22:19 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	12:22:19 PM	Tube furnace set to 50
11/16/2011	12:22:20 PM	Helium valve closed
11/16/2011	12:22:20 PM	BCl3 valve closed
11/16/2011	12:22:20 PM	PH3 valve closed
11/16/2011	12:22:20 PM	SiCl4 pre valve closed
11/16/2011	12:22:20 PM	SiCl4 post valve closed
11/16/2011	12:22:20 PM	Main Vac valve closed
11/16/2011	12:22:20 PM	Bypass valve closed
11/16/2011	12:22:20 PM	H2 valve opened
11/16/2011	12:22:20 PM	Bubbler valve opened
11/16/2011	12:22:20 PM	Helium MFC set to  0.000000
11/16/2011	12:22:20 PM	H2 MFC set to  450.000000
11/16/2011	12:22:20 PM	BCl3 MFC set to  0.000000
11/16/2011	12:22:20 PM	PHl3 MFC set to  0.000000
11/16/2011	12:22:20 PM	SiCl4 MFC set to  0.000000
11/16/2011	12:22:20 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	12:22:20 PM	Tube furnace set to 1000
11/16/2011	12:44:20 PM	Helium valve closed
11/16/2011	12:44:20 PM	PH3 valve closed
11/16/2011	12:44:20 PM	Main Vac valve closed
11/16/2011	12:44:20 PM	Bypass valve closed
11/16/2011	12:44:20 PM	H2 valve opened
11/16/2011	12:44:20 PM	BCl3 valve opened
11/16/2011	12:44:20 PM	SiCl4 pre valve opened
11/16/2011	12:44:20 PM	SiCl4 post valve opened
11/16/2011	12:44:20 PM	Bubbler valve opened
11/16/2011	12:44:20 PM	Helium MFC set to  0.000000
11/16/2011	12:44:20 PM	H2 MFC set to  500.000000
11/16/2011	12:44:20 PM	BCl3 MFC set to  1.000000
11/16/2011	12:44:20 PM	PHl3 MFC set to  0.000000
11/16/2011	12:44:20 PM	SiCl4 MFC set to  25.000000
11/16/2011	12:44:20 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	12:44:20 PM	Tube furnace set to 1000
11/16/2011	1:04:20 PM	Helium valve closed
11/16/2011	1:04:20 PM	BCl3 valve closed
11/16/2011	1:04:20 PM	PH3 valve closed
11/16/2011	1:04:20 PM	SiCl4 pre valve closed
11/16/2011	1:04:20 PM	SiCl4 post valve closed
11/16/2011	1:04:20 PM	Main Vac valve closed
11/16/2011	1:04:20 PM	Bypass valve closed
11/16/2011	1:04:20 PM	H2 valve opened
11/16/2011	1:04:20 PM	Bubbler valve opened
11/16/2011	1:04:20 PM	Helium MFC set to  0.000000
11/16/2011	1:04:20 PM	H2 MFC set to  500.000000
11/16/2011	1:04:20 PM	BCl3 MFC set to  0.000000
11/16/2011	1:04:20 PM	PHl3 MFC set to  0.000000
11/16/2011	1:04:20 PM	SiCl4 MFC set to  0.000000
11/16/2011	1:04:20 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	1:04:20 PM	Tube furnace set to 750
11/16/2011	1:14:20 PM	H2 valve closed
11/16/2011	1:14:20 PM	BCl3 valve closed
11/16/2011	1:14:20 PM	PH3 valve closed
11/16/2011	1:14:20 PM	SiCl4 pre valve closed
11/16/2011	1:14:20 PM	SiCl4 post valve closed
11/16/2011	1:14:20 PM	Main Vac valve closed
11/16/2011	1:14:20 PM	Bypass valve closed
11/16/2011	1:14:20 PM	Helium valve opened
11/16/2011	1:14:20 PM	Bubbler valve opened
11/16/2011	1:14:20 PM	Helium MFC set to  400.000000
11/16/2011	1:14:20 PM	H2 MFC set to  0.000000
11/16/2011	1:14:20 PM	BCl3 MFC set to  0.000000
11/16/2011	1:14:20 PM	PHl3 MFC set to  0.000000
11/16/2011	1:14:20 PM	SiCl4 MFC set to  0.000000
11/16/2011	1:14:20 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	1:14:21 PM	Tube furnace set to 0
11/16/2011	1:34:21 PM	Helium valve closed
11/16/2011	1:34:21 PM	H2 valve closed
11/16/2011	1:34:21 PM	BCl3 valve closed
11/16/2011	1:34:21 PM	PH3 valve closed
11/16/2011	1:34:21 PM	SiCl4 pre valve closed
11/16/2011	1:34:21 PM	SiCl4 post valve closed
11/16/2011	1:34:21 PM	Main Vac valve closed
11/16/2011	1:34:21 PM	Bypass valve closed
11/16/2011	1:34:21 PM	Bubbler valve closed
11/16/2011	1:34:21 PM	Helium MFC set to  0.000000
11/16/2011	1:34:21 PM	H2 MFC set to  0.000000
11/16/2011	1:34:21 PM	BCl3 MFC set to  0.000000
11/16/2011	1:34:21 PM	PHl3 MFC set to  0.000000
11/16/2011	1:34:21 PM	SiCl4 MFC set to  0.000000
11/16/2011	1:34:21 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	1:34:21 PM	Tube furnace set to 0
11/16/2011	1:34:22 PM	Run finished at 1:34 PM
11/16/2011	2:02:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	2:02:36 PM	Recipe started at 2:02 PM
11/16/2011	2:02:36 PM	Helium valve closed
11/16/2011	2:02:36 PM	H2 valve closed
11/16/2011	2:02:36 PM	BCl3 valve closed
11/16/2011	2:02:36 PM	PH3 valve closed
11/16/2011	2:02:36 PM	SiCl4 pre valve closed
11/16/2011	2:02:36 PM	SiCl4 post valve closed
11/16/2011	2:02:36 PM	Main Vac valve closed
11/16/2011	2:02:36 PM	Bypass valve closed
11/16/2011	2:02:36 PM	Bubbler valve closed
11/16/2011	2:02:36 PM	Helium MFC set to  0.000000
11/16/2011	2:02:36 PM	H2 MFC set to  0.000000
11/16/2011	2:02:36 PM	BCl3 MFC set to  0.000000
11/16/2011	2:02:36 PM	PHl3 MFC set to  0.000000
11/16/2011	2:02:36 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:02:36 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:02:36 PM	Tube furnace set to 0
11/16/2011	2:02:39 PM	H2 valve closed
11/16/2011	2:02:39 PM	BCl3 valve closed
11/16/2011	2:02:39 PM	PH3 valve closed
11/16/2011	2:02:39 PM	SiCl4 pre valve closed
11/16/2011	2:02:39 PM	SiCl4 post valve closed
11/16/2011	2:02:39 PM	Main Vac valve closed
11/16/2011	2:02:39 PM	Bypass valve closed
11/16/2011	2:02:39 PM	Bubbler valve closed
11/16/2011	2:02:39 PM	Helium valve opened
11/16/2011	2:02:39 PM	Helium MFC set to  500.000000
11/16/2011	2:02:39 PM	H2 MFC set to  0.000000
11/16/2011	2:02:39 PM	BCl3 MFC set to  0.000000
11/16/2011	2:02:39 PM	PHl3 MFC set to  0.000000
11/16/2011	2:02:39 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:02:39 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:02:40 PM	Tube furnace set to 0
11/16/2011	2:02:42 PM	Helium valve closed
11/16/2011	2:02:42 PM	H2 valve closed
11/16/2011	2:02:42 PM	BCl3 valve closed
11/16/2011	2:02:42 PM	PH3 valve closed
11/16/2011	2:02:42 PM	SiCl4 pre valve closed
11/16/2011	2:02:42 PM	SiCl4 post valve closed
11/16/2011	2:02:42 PM	Main Vac valve closed
11/16/2011	2:02:42 PM	Bypass valve closed
11/16/2011	2:02:42 PM	Bubbler valve closed
11/16/2011	2:02:42 PM	Helium MFC set to  0.000000
11/16/2011	2:02:42 PM	H2 MFC set to  0.000000
11/16/2011	2:02:42 PM	BCl3 MFC set to  0.000000
11/16/2011	2:02:42 PM	PHl3 MFC set to  0.000000
11/16/2011	2:02:42 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:02:42 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:02:42 PM	Tube furnace set to 0
11/16/2011	2:02:43 PM	Run finished at 2:02 PM
11/16/2011	2:02:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	2:09:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	2:09:51 PM	Recipe started at 2:09 PM
11/16/2011	2:09:51 PM	Helium valve closed
11/16/2011	2:09:51 PM	H2 valve closed
11/16/2011	2:09:51 PM	BCl3 valve closed
11/16/2011	2:09:51 PM	PH3 valve closed
11/16/2011	2:09:51 PM	SiCl4 pre valve closed
11/16/2011	2:09:51 PM	SiCl4 post valve closed
11/16/2011	2:09:51 PM	Main Vac valve closed
11/16/2011	2:09:51 PM	Bubbler valve closed
11/16/2011	2:09:51 PM	Bypass valve opened
11/16/2011	2:09:51 PM	Helium MFC set to  0.000000
11/16/2011	2:09:51 PM	H2 MFC set to  0.000000
11/16/2011	2:09:51 PM	BCl3 MFC set to  0.000000
11/16/2011	2:09:51 PM	PHl3 MFC set to  0.000000
11/16/2011	2:09:51 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:09:51 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:09:51 PM	Tube furnace set to 0
11/16/2011	2:11:37 PM	Helium valve closed
11/16/2011	2:11:37 PM	H2 valve closed
11/16/2011	2:11:37 PM	BCl3 valve closed
11/16/2011	2:11:37 PM	PH3 valve closed
11/16/2011	2:11:37 PM	SiCl4 pre valve closed
11/16/2011	2:11:37 PM	SiCl4 post valve closed
11/16/2011	2:11:37 PM	Main Vac valve closed
11/16/2011	2:11:37 PM	Bubbler valve closed
11/16/2011	2:11:37 PM	Bypass valve opened
11/16/2011	2:11:37 PM	Helium MFC set to  0.000000
11/16/2011	2:11:37 PM	H2 MFC set to  0.000000
11/16/2011	2:11:37 PM	BCl3 MFC set to  0.000000
11/16/2011	2:11:37 PM	PHl3 MFC set to  0.000000
11/16/2011	2:11:37 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:11:37 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:11:37 PM	Tube furnace set to 0
11/16/2011	2:12:37 PM	Helium valve closed
11/16/2011	2:12:37 PM	H2 valve closed
11/16/2011	2:12:37 PM	BCl3 valve closed
11/16/2011	2:12:37 PM	PH3 valve closed
11/16/2011	2:12:37 PM	SiCl4 pre valve closed
11/16/2011	2:12:37 PM	SiCl4 post valve closed
11/16/2011	2:12:37 PM	Bypass valve closed
11/16/2011	2:12:37 PM	Bubbler valve closed
11/16/2011	2:12:37 PM	Main Vac valve opened
11/16/2011	2:12:37 PM	Helium MFC set to  0.000000
11/16/2011	2:12:37 PM	H2 MFC set to  0.000000
11/16/2011	2:12:37 PM	BCl3 MFC set to  0.000000
11/16/2011	2:12:37 PM	PHl3 MFC set to  0.000000
11/16/2011	2:12:37 PM	SiCl4 MFC set to  0.000000
11/16/2011	2:12:37 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	2:12:37 PM	Tube furnace set to 0
11/16/2011	2:12:38 PM	Run finished at 2:12 PM
11/16/2011	2:12:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	2:25:13 PM	Helium MFC set to  20.000000
11/16/2011	2:25:16 PM	Helium valve opened
11/16/2011	2:31:37 PM	Helium valve closed
11/16/2011	2:31:40 PM	Helium MFC set to  0.000000
11/16/2011	3:00:17 PM	Main Vac valve closed
11/16/2011	3:00:50 PM	Main Vac valve opened
11/16/2011	3:02:25 PM	Helium MFC set to  20.000000
11/16/2011	3:02:31 PM	Helium valve opened
11/16/2011	3:06:41 PM	Helium valve closed
11/16/2011	3:08:05 PM	Main Vac valve closed
11/16/2011	3:08:39 PM	Main Vac valve opened
11/16/2011	3:08:55 PM	Helium valve opened
11/16/2011	3:09:11 PM	Helium valve closed
11/16/2011	3:55:04 PM	Main Vac valve closed
11/16/2011	3:55:38 PM	Main Vac valve opened
11/16/2011	3:56:03 PM	Recipe started at 3:56 PM
11/16/2011	3:56:03 PM	Helium valve closed
11/16/2011	3:56:03 PM	H2 valve closed
11/16/2011	3:56:03 PM	BCl3 valve closed
11/16/2011	3:56:03 PM	PH3 valve closed
11/16/2011	3:56:03 PM	SiCl4 pre valve closed
11/16/2011	3:56:03 PM	SiCl4 post valve closed
11/16/2011	3:56:03 PM	Main Vac valve closed
11/16/2011	3:56:03 PM	Bypass valve closed
11/16/2011	3:56:03 PM	Bubbler valve closed
11/16/2011	3:56:03 PM	Helium MFC set to  0.000000
11/16/2011	3:56:03 PM	H2 MFC set to  0.000000
11/16/2011	3:56:03 PM	BCl3 MFC set to  0.000000
11/16/2011	3:56:03 PM	PHl3 MFC set to  0.000000
11/16/2011	3:56:03 PM	SiCl4 MFC set to  0.000000
11/16/2011	3:56:03 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	3:56:04 PM	Tube furnace set to 0
11/16/2011	3:56:07 PM	Helium valve closed
11/16/2011	3:56:07 PM	BCl3 valve closed
11/16/2011	3:56:07 PM	PH3 valve closed
11/16/2011	3:56:07 PM	SiCl4 pre valve closed
11/16/2011	3:56:07 PM	SiCl4 post valve closed
11/16/2011	3:56:07 PM	Main Vac valve closed
11/16/2011	3:56:07 PM	Bypass valve closed
11/16/2011	3:56:07 PM	Bubbler valve closed
11/16/2011	3:56:07 PM	H2 valve opened
11/16/2011	3:56:07 PM	Helium MFC set to  0.000000
11/16/2011	3:56:07 PM	H2 MFC set to  500.000000
11/16/2011	3:56:07 PM	BCl3 MFC set to  0.000000
11/16/2011	3:56:07 PM	PHl3 MFC set to  0.000000
11/16/2011	3:56:07 PM	SiCl4 MFC set to  0.000000
11/16/2011	3:56:07 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	3:56:07 PM	Tube furnace set to 50
11/16/2011	3:57:13 PM	Helium valve closed
11/16/2011	3:57:13 PM	BCl3 valve closed
11/16/2011	3:57:13 PM	PH3 valve closed
11/16/2011	3:57:13 PM	SiCl4 pre valve closed
11/16/2011	3:57:13 PM	SiCl4 post valve closed
11/16/2011	3:57:13 PM	Main Vac valve closed
11/16/2011	3:57:13 PM	Bypass valve closed
11/16/2011	3:57:13 PM	H2 valve opened
11/16/2011	3:57:13 PM	Bubbler valve opened
11/16/2011	3:57:13 PM	Helium MFC set to  0.000000
11/16/2011	3:57:13 PM	H2 MFC set to  500.000000
11/16/2011	3:57:13 PM	BCl3 MFC set to  0.000000
11/16/2011	3:57:13 PM	PHl3 MFC set to  0.000000
11/16/2011	3:57:13 PM	SiCl4 MFC set to  0.000000
11/16/2011	3:57:13 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	3:57:13 PM	Tube furnace set to 50
11/16/2011	3:57:14 PM	Helium valve closed
11/16/2011	3:57:14 PM	BCl3 valve closed
11/16/2011	3:57:14 PM	PH3 valve closed
11/16/2011	3:57:14 PM	SiCl4 pre valve closed
11/16/2011	3:57:14 PM	SiCl4 post valve closed
11/16/2011	3:57:14 PM	Main Vac valve closed
11/16/2011	3:57:14 PM	Bypass valve closed
11/16/2011	3:57:14 PM	H2 valve opened
11/16/2011	3:57:14 PM	Bubbler valve opened
11/16/2011	3:57:14 PM	Helium MFC set to  0.000000
11/16/2011	3:57:14 PM	H2 MFC set to  450.000000
11/16/2011	3:57:14 PM	BCl3 MFC set to  0.000000
11/16/2011	3:57:14 PM	PHl3 MFC set to  0.000000
11/16/2011	3:57:14 PM	SiCl4 MFC set to  0.000000
11/16/2011	3:57:14 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	3:57:15 PM	Tube furnace set to 1000
11/16/2011	4:20:15 PM	Helium valve closed
11/16/2011	4:20:15 PM	PH3 valve closed
11/16/2011	4:20:15 PM	Main Vac valve closed
11/16/2011	4:20:15 PM	Bypass valve closed
11/16/2011	4:20:15 PM	H2 valve opened
11/16/2011	4:20:15 PM	BCl3 valve opened
11/16/2011	4:20:15 PM	SiCl4 pre valve opened
11/16/2011	4:20:15 PM	SiCl4 post valve opened
11/16/2011	4:20:15 PM	Bubbler valve opened
11/16/2011	4:20:15 PM	Helium MFC set to  0.000000
11/16/2011	4:20:15 PM	H2 MFC set to  500.000000
11/16/2011	4:20:15 PM	BCl3 MFC set to  1.000000
11/16/2011	4:20:15 PM	PHl3 MFC set to  0.000000
11/16/2011	4:20:15 PM	SiCl4 MFC set to  25.000000
11/16/2011	4:20:15 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	4:20:15 PM	Tube furnace set to 1000
11/16/2011	4:40:15 PM	Helium valve closed
11/16/2011	4:40:15 PM	BCl3 valve closed
11/16/2011	4:40:15 PM	PH3 valve closed
11/16/2011	4:40:15 PM	SiCl4 pre valve closed
11/16/2011	4:40:15 PM	SiCl4 post valve closed
11/16/2011	4:40:15 PM	Main Vac valve closed
11/16/2011	4:40:15 PM	Bypass valve closed
11/16/2011	4:40:15 PM	H2 valve opened
11/16/2011	4:40:15 PM	Bubbler valve opened
11/16/2011	4:40:15 PM	Helium MFC set to  0.000000
11/16/2011	4:40:15 PM	H2 MFC set to  500.000000
11/16/2011	4:40:15 PM	BCl3 MFC set to  0.000000
11/16/2011	4:40:15 PM	PHl3 MFC set to  0.000000
11/16/2011	4:40:15 PM	SiCl4 MFC set to  0.000000
11/16/2011	4:40:15 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	4:40:15 PM	Tube furnace set to 750
11/16/2011	4:50:15 PM	H2 valve closed
11/16/2011	4:50:15 PM	BCl3 valve closed
11/16/2011	4:50:15 PM	PH3 valve closed
11/16/2011	4:50:15 PM	SiCl4 pre valve closed
11/16/2011	4:50:15 PM	SiCl4 post valve closed
11/16/2011	4:50:15 PM	Main Vac valve closed
11/16/2011	4:50:15 PM	Bypass valve closed
11/16/2011	4:50:15 PM	Helium valve opened
11/16/2011	4:50:15 PM	Bubbler valve opened
11/16/2011	4:50:15 PM	Helium MFC set to  400.000000
11/16/2011	4:50:15 PM	H2 MFC set to  0.000000
11/16/2011	4:50:15 PM	BCl3 MFC set to  0.000000
11/16/2011	4:50:15 PM	PHl3 MFC set to  0.000000
11/16/2011	4:50:15 PM	SiCl4 MFC set to  0.000000
11/16/2011	4:50:15 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	4:50:15 PM	Tube furnace set to 0
11/16/2011	5:10:15 PM	Helium valve closed
11/16/2011	5:10:15 PM	H2 valve closed
11/16/2011	5:10:15 PM	BCl3 valve closed
11/16/2011	5:10:15 PM	PH3 valve closed
11/16/2011	5:10:15 PM	SiCl4 pre valve closed
11/16/2011	5:10:15 PM	SiCl4 post valve closed
11/16/2011	5:10:15 PM	Main Vac valve closed
11/16/2011	5:10:15 PM	Bypass valve closed
11/16/2011	5:10:15 PM	Bubbler valve closed
11/16/2011	5:10:15 PM	Helium MFC set to  0.000000
11/16/2011	5:10:15 PM	H2 MFC set to  0.000000
11/16/2011	5:10:15 PM	BCl3 MFC set to  0.000000
11/16/2011	5:10:15 PM	PHl3 MFC set to  0.000000
11/16/2011	5:10:15 PM	SiCl4 MFC set to  0.000000
11/16/2011	5:10:15 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	5:10:15 PM	Tube furnace set to 0
11/16/2011	5:10:16 PM	Run finished at 5:10 PM
11/16/2011	5:25:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	5:25:43 PM	Recipe started at 5:25 PM
11/16/2011	5:25:43 PM	Helium valve closed
11/16/2011	5:25:43 PM	H2 valve closed
11/16/2011	5:25:43 PM	BCl3 valve closed
11/16/2011	5:25:43 PM	PH3 valve closed
11/16/2011	5:25:43 PM	SiCl4 pre valve closed
11/16/2011	5:25:43 PM	SiCl4 post valve closed
11/16/2011	5:25:43 PM	Main Vac valve closed
11/16/2011	5:25:43 PM	Bubbler valve closed
11/16/2011	5:25:43 PM	Bypass valve opened
11/16/2011	5:25:43 PM	Helium MFC set to  0.000000
11/16/2011	5:25:43 PM	H2 MFC set to  0.000000
11/16/2011	5:25:43 PM	BCl3 MFC set to  0.000000
11/16/2011	5:25:43 PM	PHl3 MFC set to  0.000000
11/16/2011	5:25:43 PM	SiCl4 MFC set to  0.000000
11/16/2011	5:25:43 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	5:25:43 PM	Tube furnace set to 0
11/16/2011	5:27:28 PM	Helium valve closed
11/16/2011	5:27:28 PM	H2 valve closed
11/16/2011	5:27:28 PM	BCl3 valve closed
11/16/2011	5:27:28 PM	PH3 valve closed
11/16/2011	5:27:28 PM	SiCl4 pre valve closed
11/16/2011	5:27:28 PM	SiCl4 post valve closed
11/16/2011	5:27:28 PM	Main Vac valve closed
11/16/2011	5:27:28 PM	Bubbler valve closed
11/16/2011	5:27:28 PM	Bypass valve opened
11/16/2011	5:27:28 PM	Helium MFC set to  0.000000
11/16/2011	5:27:28 PM	H2 MFC set to  0.000000
11/16/2011	5:27:28 PM	BCl3 MFC set to  0.000000
11/16/2011	5:27:28 PM	PHl3 MFC set to  0.000000
11/16/2011	5:27:28 PM	SiCl4 MFC set to  0.000000
11/16/2011	5:27:28 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	5:27:28 PM	Tube furnace set to 0
11/16/2011	5:28:28 PM	Helium valve closed
11/16/2011	5:28:28 PM	H2 valve closed
11/16/2011	5:28:28 PM	BCl3 valve closed
11/16/2011	5:28:28 PM	PH3 valve closed
11/16/2011	5:28:28 PM	SiCl4 pre valve closed
11/16/2011	5:28:28 PM	SiCl4 post valve closed
11/16/2011	5:28:28 PM	Bypass valve closed
11/16/2011	5:28:28 PM	Bubbler valve closed
11/16/2011	5:28:28 PM	Main Vac valve opened
11/16/2011	5:28:28 PM	Helium MFC set to  0.000000
11/16/2011	5:28:28 PM	H2 MFC set to  0.000000
11/16/2011	5:28:28 PM	BCl3 MFC set to  0.000000
11/16/2011	5:28:28 PM	PHl3 MFC set to  0.000000
11/16/2011	5:28:28 PM	SiCl4 MFC set to  0.000000
11/16/2011	5:28:28 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	5:28:29 PM	Tube furnace set to 0
11/16/2011	5:28:30 PM	Run finished at 5:28 PM
11/16/2011	5:28:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	5:59:35 PM	Helium MFC set to  20.000000
11/16/2011	5:59:35 PM	Helium valve opened
11/16/2011	6:02:08 PM	Helium valve closed
11/16/2011	6:03:01 PM	Main Vac valve closed
11/16/2011	6:03:27 PM	Main Vac valve opened
11/16/2011	6:03:28 PM	Helium valve opened
11/16/2011	6:04:27 PM	Helium valve closed
11/16/2011	6:04:29 PM	Helium MFC set to  0.000000
11/16/2011	6:13:42 PM	Main Vac valve closed
11/16/2011	6:14:06 PM	Main Vac valve opened
11/16/2011	6:14:17 PM	Helium MFC set to  20.000000
11/16/2011	6:14:18 PM	Helium valve opened
11/16/2011	6:14:58 PM	Helium valve closed
11/16/2011	6:15:00 PM	Helium MFC set to  0.000000
11/16/2011	6:22:53 PM	Main Vac valve closed
11/16/2011	6:23:15 PM	Main Vac valve opened
11/16/2011	6:25:35 PM	Recipe started at 6:25 PM
11/16/2011	6:25:35 PM	Helium valve closed
11/16/2011	6:25:35 PM	H2 valve closed
11/16/2011	6:25:35 PM	BCl3 valve closed
11/16/2011	6:25:35 PM	PH3 valve closed
11/16/2011	6:25:35 PM	SiCl4 pre valve closed
11/16/2011	6:25:35 PM	SiCl4 post valve closed
11/16/2011	6:25:35 PM	Main Vac valve closed
11/16/2011	6:25:35 PM	Bypass valve closed
11/16/2011	6:25:35 PM	Bubbler valve closed
11/16/2011	6:25:35 PM	Helium MFC set to  0.000000
11/16/2011	6:25:35 PM	H2 MFC set to  0.000000
11/16/2011	6:25:35 PM	BCl3 MFC set to  0.000000
11/16/2011	6:25:35 PM	PHl3 MFC set to  0.000000
11/16/2011	6:25:35 PM	SiCl4 MFC set to  0.000000
11/16/2011	6:25:35 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	6:25:35 PM	Tube furnace set to 0
11/16/2011	6:25:38 PM	Helium valve closed
11/16/2011	6:25:38 PM	BCl3 valve closed
11/16/2011	6:25:38 PM	PH3 valve closed
11/16/2011	6:25:38 PM	SiCl4 pre valve closed
11/16/2011	6:25:38 PM	SiCl4 post valve closed
11/16/2011	6:25:38 PM	Main Vac valve closed
11/16/2011	6:25:38 PM	Bypass valve closed
11/16/2011	6:25:38 PM	Bubbler valve closed
11/16/2011	6:25:38 PM	H2 valve opened
11/16/2011	6:25:38 PM	Helium MFC set to  0.000000
11/16/2011	6:25:38 PM	H2 MFC set to  500.000000
11/16/2011	6:25:38 PM	BCl3 MFC set to  0.000000
11/16/2011	6:25:38 PM	PHl3 MFC set to  0.000000
11/16/2011	6:25:38 PM	SiCl4 MFC set to  0.000000
11/16/2011	6:25:38 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	6:25:38 PM	Tube furnace set to 50
11/16/2011	6:26:44 PM	Helium valve closed
11/16/2011	6:26:44 PM	BCl3 valve closed
11/16/2011	6:26:44 PM	PH3 valve closed
11/16/2011	6:26:44 PM	SiCl4 pre valve closed
11/16/2011	6:26:44 PM	SiCl4 post valve closed
11/16/2011	6:26:44 PM	Main Vac valve closed
11/16/2011	6:26:44 PM	Bypass valve closed
11/16/2011	6:26:44 PM	H2 valve opened
11/16/2011	6:26:44 PM	Bubbler valve opened
11/16/2011	6:26:44 PM	Helium MFC set to  0.000000
11/16/2011	6:26:44 PM	H2 MFC set to  500.000000
11/16/2011	6:26:44 PM	BCl3 MFC set to  0.000000
11/16/2011	6:26:44 PM	PHl3 MFC set to  0.000000
11/16/2011	6:26:44 PM	SiCl4 MFC set to  0.000000
11/16/2011	6:26:44 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	6:26:45 PM	Tube furnace set to 50
11/16/2011	6:26:46 PM	Helium valve closed
11/16/2011	6:26:46 PM	BCl3 valve closed
11/16/2011	6:26:46 PM	PH3 valve closed
11/16/2011	6:26:46 PM	SiCl4 pre valve closed
11/16/2011	6:26:46 PM	SiCl4 post valve closed
11/16/2011	6:26:46 PM	Main Vac valve closed
11/16/2011	6:26:46 PM	Bypass valve closed
11/16/2011	6:26:46 PM	H2 valve opened
11/16/2011	6:26:46 PM	Bubbler valve opened
11/16/2011	6:26:46 PM	Helium MFC set to  0.000000
11/16/2011	6:26:46 PM	H2 MFC set to  450.000000
11/16/2011	6:26:46 PM	BCl3 MFC set to  0.000000
11/16/2011	6:26:46 PM	PHl3 MFC set to  0.000000
11/16/2011	6:26:46 PM	SiCl4 MFC set to  0.000000
11/16/2011	6:26:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	6:26:46 PM	Tube furnace set to 1000
11/16/2011	6:49:46 PM	Helium valve closed
11/16/2011	6:49:46 PM	PH3 valve closed
11/16/2011	6:49:46 PM	Main Vac valve closed
11/16/2011	6:49:46 PM	Bypass valve closed
11/16/2011	6:49:46 PM	H2 valve opened
11/16/2011	6:49:46 PM	BCl3 valve opened
11/16/2011	6:49:46 PM	SiCl4 pre valve opened
11/16/2011	6:49:46 PM	SiCl4 post valve opened
11/16/2011	6:49:46 PM	Bubbler valve opened
11/16/2011	6:49:46 PM	Helium MFC set to  0.000000
11/16/2011	6:49:46 PM	H2 MFC set to  500.000000
11/16/2011	6:49:46 PM	BCl3 MFC set to  1.000000
11/16/2011	6:49:46 PM	PHl3 MFC set to  0.000000
11/16/2011	6:49:46 PM	SiCl4 MFC set to  25.000000
11/16/2011	6:49:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	6:49:46 PM	Tube furnace set to 1000
11/16/2011	7:07:46 PM	Helium valve closed
11/16/2011	7:07:46 PM	BCl3 valve closed
11/16/2011	7:07:46 PM	PH3 valve closed
11/16/2011	7:07:46 PM	SiCl4 pre valve closed
11/16/2011	7:07:46 PM	SiCl4 post valve closed
11/16/2011	7:07:46 PM	Main Vac valve closed
11/16/2011	7:07:46 PM	Bypass valve closed
11/16/2011	7:07:46 PM	H2 valve opened
11/16/2011	7:07:46 PM	Bubbler valve opened
11/16/2011	7:07:46 PM	Helium MFC set to  0.000000
11/16/2011	7:07:46 PM	H2 MFC set to  500.000000
11/16/2011	7:07:46 PM	BCl3 MFC set to  0.000000
11/16/2011	7:07:46 PM	PHl3 MFC set to  0.000000
11/16/2011	7:07:46 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:07:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:07:46 PM	Tube furnace set to 750
11/16/2011	7:17:46 PM	H2 valve closed
11/16/2011	7:17:46 PM	BCl3 valve closed
11/16/2011	7:17:46 PM	PH3 valve closed
11/16/2011	7:17:46 PM	SiCl4 pre valve closed
11/16/2011	7:17:46 PM	SiCl4 post valve closed
11/16/2011	7:17:46 PM	Main Vac valve closed
11/16/2011	7:17:46 PM	Bypass valve closed
11/16/2011	7:17:46 PM	Helium valve opened
11/16/2011	7:17:46 PM	Bubbler valve opened
11/16/2011	7:17:46 PM	Helium MFC set to  400.000000
11/16/2011	7:17:46 PM	H2 MFC set to  0.000000
11/16/2011	7:17:46 PM	BCl3 MFC set to  0.000000
11/16/2011	7:17:46 PM	PHl3 MFC set to  0.000000
11/16/2011	7:17:46 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:17:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:17:46 PM	Tube furnace set to 0
11/16/2011	7:37:46 PM	Helium valve closed
11/16/2011	7:37:46 PM	H2 valve closed
11/16/2011	7:37:46 PM	BCl3 valve closed
11/16/2011	7:37:46 PM	PH3 valve closed
11/16/2011	7:37:46 PM	SiCl4 pre valve closed
11/16/2011	7:37:46 PM	SiCl4 post valve closed
11/16/2011	7:37:46 PM	Main Vac valve closed
11/16/2011	7:37:46 PM	Bypass valve closed
11/16/2011	7:37:46 PM	Bubbler valve closed
11/16/2011	7:37:46 PM	Helium MFC set to  0.000000
11/16/2011	7:37:46 PM	H2 MFC set to  0.000000
11/16/2011	7:37:46 PM	BCl3 MFC set to  0.000000
11/16/2011	7:37:46 PM	PHl3 MFC set to  0.000000
11/16/2011	7:37:46 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:37:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:37:46 PM	Tube furnace set to 0
11/16/2011	7:42:46 PM	Helium valve closed
11/16/2011	7:42:46 PM	H2 valve closed
11/16/2011	7:42:46 PM	BCl3 valve closed
11/16/2011	7:42:46 PM	PH3 valve closed
11/16/2011	7:42:46 PM	SiCl4 pre valve closed
11/16/2011	7:42:46 PM	SiCl4 post valve closed
11/16/2011	7:42:46 PM	Main Vac valve closed
11/16/2011	7:42:46 PM	Bubbler valve closed
11/16/2011	7:42:46 PM	Bypass valve opened
11/16/2011	7:42:46 PM	Helium MFC set to  0.000000
11/16/2011	7:42:46 PM	H2 MFC set to  0.000000
11/16/2011	7:42:46 PM	BCl3 MFC set to  0.000000
11/16/2011	7:42:46 PM	PHl3 MFC set to  0.000000
11/16/2011	7:42:46 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:42:46 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:42:47 PM	Tube furnace set to 0
11/16/2011	7:42:48 PM	Run finished at 7:42 PM
11/16/2011	7:48:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	7:48:22 PM	Recipe started at 7:48 PM
11/16/2011	7:48:22 PM	Helium valve closed
11/16/2011	7:48:22 PM	H2 valve closed
11/16/2011	7:48:22 PM	BCl3 valve closed
11/16/2011	7:48:22 PM	PH3 valve closed
11/16/2011	7:48:22 PM	SiCl4 pre valve closed
11/16/2011	7:48:22 PM	SiCl4 post valve closed
11/16/2011	7:48:22 PM	Main Vac valve closed
11/16/2011	7:48:22 PM	Bypass valve closed
11/16/2011	7:48:22 PM	Bubbler valve closed
11/16/2011	7:48:22 PM	Helium MFC set to  0.000000
11/16/2011	7:48:22 PM	H2 MFC set to  0.000000
11/16/2011	7:48:22 PM	BCl3 MFC set to  0.000000
11/16/2011	7:48:22 PM	PHl3 MFC set to  0.000000
11/16/2011	7:48:22 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:48:22 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:48:22 PM	Tube furnace set to 0
11/16/2011	7:48:25 PM	H2 valve closed
11/16/2011	7:48:25 PM	BCl3 valve closed
11/16/2011	7:48:25 PM	PH3 valve closed
11/16/2011	7:48:25 PM	SiCl4 pre valve closed
11/16/2011	7:48:25 PM	SiCl4 post valve closed
11/16/2011	7:48:25 PM	Main Vac valve closed
11/16/2011	7:48:25 PM	Bypass valve closed
11/16/2011	7:48:25 PM	Bubbler valve closed
11/16/2011	7:48:25 PM	Helium valve opened
11/16/2011	7:48:25 PM	Helium MFC set to  500.000000
11/16/2011	7:48:25 PM	H2 MFC set to  0.000000
11/16/2011	7:48:25 PM	BCl3 MFC set to  0.000000
11/16/2011	7:48:25 PM	PHl3 MFC set to  0.000000
11/16/2011	7:48:25 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:48:25 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:48:25 PM	Tube furnace set to 0
11/16/2011	7:49:27 PM	Helium valve closed
11/16/2011	7:49:27 PM	H2 valve closed
11/16/2011	7:49:27 PM	BCl3 valve closed
11/16/2011	7:49:27 PM	PH3 valve closed
11/16/2011	7:49:27 PM	SiCl4 pre valve closed
11/16/2011	7:49:27 PM	SiCl4 post valve closed
11/16/2011	7:49:27 PM	Main Vac valve closed
11/16/2011	7:49:27 PM	Bypass valve closed
11/16/2011	7:49:27 PM	Bubbler valve closed
11/16/2011	7:49:27 PM	Helium MFC set to  0.000000
11/16/2011	7:49:27 PM	H2 MFC set to  0.000000
11/16/2011	7:49:27 PM	BCl3 MFC set to  0.000000
11/16/2011	7:49:27 PM	PHl3 MFC set to  0.000000
11/16/2011	7:49:28 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:49:28 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:49:28 PM	Tube furnace set to 0
11/16/2011	7:49:29 PM	Run finished at 7:49 PM
11/16/2011	7:49:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/16/2011	7:52:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	7:52:20 PM	Recipe started at 7:52 PM
11/16/2011	7:52:20 PM	Helium valve closed
11/16/2011	7:52:20 PM	H2 valve closed
11/16/2011	7:52:20 PM	BCl3 valve closed
11/16/2011	7:52:20 PM	PH3 valve closed
11/16/2011	7:52:20 PM	SiCl4 pre valve closed
11/16/2011	7:52:20 PM	SiCl4 post valve closed
11/16/2011	7:52:20 PM	Main Vac valve closed
11/16/2011	7:52:20 PM	Bubbler valve closed
11/16/2011	7:52:20 PM	Bypass valve opened
11/16/2011	7:52:20 PM	Helium MFC set to  0.000000
11/16/2011	7:52:20 PM	H2 MFC set to  0.000000
11/16/2011	7:52:20 PM	BCl3 MFC set to  0.000000
11/16/2011	7:52:20 PM	PHl3 MFC set to  0.000000
11/16/2011	7:52:20 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:52:20 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:52:20 PM	Tube furnace set to 0
11/16/2011	7:54:06 PM	Helium valve closed
11/16/2011	7:54:06 PM	H2 valve closed
11/16/2011	7:54:06 PM	BCl3 valve closed
11/16/2011	7:54:06 PM	PH3 valve closed
11/16/2011	7:54:06 PM	SiCl4 pre valve closed
11/16/2011	7:54:06 PM	SiCl4 post valve closed
11/16/2011	7:54:06 PM	Main Vac valve closed
11/16/2011	7:54:06 PM	Bubbler valve closed
11/16/2011	7:54:06 PM	Bypass valve opened
11/16/2011	7:54:06 PM	Helium MFC set to  0.000000
11/16/2011	7:54:06 PM	H2 MFC set to  0.000000
11/16/2011	7:54:06 PM	BCl3 MFC set to  0.000000
11/16/2011	7:54:06 PM	PHl3 MFC set to  0.000000
11/16/2011	7:54:06 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:54:06 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:54:06 PM	Tube furnace set to 0
11/16/2011	7:55:06 PM	Helium valve closed
11/16/2011	7:55:06 PM	H2 valve closed
11/16/2011	7:55:06 PM	BCl3 valve closed
11/16/2011	7:55:06 PM	PH3 valve closed
11/16/2011	7:55:06 PM	SiCl4 pre valve closed
11/16/2011	7:55:06 PM	SiCl4 post valve closed
11/16/2011	7:55:06 PM	Bypass valve closed
11/16/2011	7:55:06 PM	Bubbler valve closed
11/16/2011	7:55:06 PM	Main Vac valve opened
11/16/2011	7:55:06 PM	Helium MFC set to  0.000000
11/16/2011	7:55:06 PM	H2 MFC set to  0.000000
11/16/2011	7:55:06 PM	BCl3 MFC set to  0.000000
11/16/2011	7:55:06 PM	PHl3 MFC set to  0.000000
11/16/2011	7:55:06 PM	SiCl4 MFC set to  0.000000
11/16/2011	7:55:06 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	7:55:06 PM	Tube furnace set to 0
11/16/2011	7:55:07 PM	Run finished at 7:55 PM
11/16/2011	7:55:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	8:57:10 PM	Helium MFC set to  20.000000
11/16/2011	8:57:11 PM	Helium valve opened
11/16/2011	9:06:07 PM	Helium valve closed
11/16/2011	9:06:48 PM	Main Vac valve closed
11/16/2011	9:07:12 PM	Main Vac valve opened
11/16/2011	9:08:38 PM	Recipe started at 9:08 PM
11/16/2011	9:08:38 PM	Helium valve closed
11/16/2011	9:08:38 PM	H2 valve closed
11/16/2011	9:08:38 PM	BCl3 valve closed
11/16/2011	9:08:38 PM	PH3 valve closed
11/16/2011	9:08:38 PM	SiCl4 pre valve closed
11/16/2011	9:08:38 PM	SiCl4 post valve closed
11/16/2011	9:08:38 PM	Main Vac valve closed
11/16/2011	9:08:38 PM	Bypass valve closed
11/16/2011	9:08:38 PM	Bubbler valve closed
11/16/2011	9:08:38 PM	Helium MFC set to  0.000000
11/16/2011	9:08:38 PM	H2 MFC set to  0.000000
11/16/2011	9:08:38 PM	BCl3 MFC set to  0.000000
11/16/2011	9:08:38 PM	PHl3 MFC set to  0.000000
11/16/2011	9:08:38 PM	SiCl4 MFC set to  0.000000
11/16/2011	9:08:38 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:08:38 PM	Tube furnace set to 0
11/16/2011	9:08:41 PM	Helium valve closed
11/16/2011	9:08:41 PM	BCl3 valve closed
11/16/2011	9:08:41 PM	PH3 valve closed
11/16/2011	9:08:41 PM	SiCl4 pre valve closed
11/16/2011	9:08:41 PM	SiCl4 post valve closed
11/16/2011	9:08:41 PM	Main Vac valve closed
11/16/2011	9:08:41 PM	Bypass valve closed
11/16/2011	9:08:41 PM	Bubbler valve closed
11/16/2011	9:08:41 PM	H2 valve opened
11/16/2011	9:08:41 PM	Helium MFC set to  0.000000
11/16/2011	9:08:41 PM	H2 MFC set to  500.000000
11/16/2011	9:08:41 PM	BCl3 MFC set to  0.000000
11/16/2011	9:08:41 PM	PHl3 MFC set to  0.000000
11/16/2011	9:08:41 PM	SiCl4 MFC set to  0.000000
11/16/2011	9:08:41 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:08:41 PM	Tube furnace set to 50
11/16/2011	9:09:49 PM	Helium valve closed
11/16/2011	9:09:49 PM	BCl3 valve closed
11/16/2011	9:09:49 PM	PH3 valve closed
11/16/2011	9:09:49 PM	SiCl4 pre valve closed
11/16/2011	9:09:49 PM	SiCl4 post valve closed
11/16/2011	9:09:49 PM	Main Vac valve closed
11/16/2011	9:09:49 PM	Bypass valve closed
11/16/2011	9:09:49 PM	H2 valve opened
11/16/2011	9:09:49 PM	Bubbler valve opened
11/16/2011	9:09:49 PM	Helium MFC set to  0.000000
11/16/2011	9:09:49 PM	H2 MFC set to  500.000000
11/16/2011	9:09:49 PM	BCl3 MFC set to  0.000000
11/16/2011	9:09:49 PM	PHl3 MFC set to  0.000000
11/16/2011	9:09:49 PM	SiCl4 MFC set to  0.000000
11/16/2011	9:09:49 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:09:49 PM	Tube furnace set to 50
11/16/2011	9:09:50 PM	Helium valve closed
11/16/2011	9:09:50 PM	BCl3 valve closed
11/16/2011	9:09:50 PM	PH3 valve closed
11/16/2011	9:09:50 PM	SiCl4 pre valve closed
11/16/2011	9:09:50 PM	SiCl4 post valve closed
11/16/2011	9:09:50 PM	Main Vac valve closed
11/16/2011	9:09:50 PM	Bypass valve closed
11/16/2011	9:09:50 PM	H2 valve opened
11/16/2011	9:09:50 PM	Bubbler valve opened
11/16/2011	9:09:50 PM	Helium MFC set to  0.000000
11/16/2011	9:09:50 PM	H2 MFC set to  450.000000
11/16/2011	9:09:50 PM	BCl3 MFC set to  0.000000
11/16/2011	9:09:50 PM	PHl3 MFC set to  0.000000
11/16/2011	9:09:50 PM	SiCl4 MFC set to  0.000000
11/16/2011	9:09:50 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:09:50 PM	Tube furnace set to 1000
11/16/2011	9:32:50 PM	Helium valve closed
11/16/2011	9:32:50 PM	PH3 valve closed
11/16/2011	9:32:50 PM	Main Vac valve closed
11/16/2011	9:32:50 PM	Bypass valve closed
11/16/2011	9:32:50 PM	H2 valve opened
11/16/2011	9:32:50 PM	BCl3 valve opened
11/16/2011	9:32:50 PM	SiCl4 pre valve opened
11/16/2011	9:32:50 PM	SiCl4 post valve opened
11/16/2011	9:32:50 PM	Bubbler valve opened
11/16/2011	9:32:50 PM	Helium MFC set to  0.000000
11/16/2011	9:32:50 PM	H2 MFC set to  500.000000
11/16/2011	9:32:50 PM	BCl3 MFC set to  1.000000
11/16/2011	9:32:50 PM	PHl3 MFC set to  0.000000
11/16/2011	9:32:50 PM	SiCl4 MFC set to  26.000000
11/16/2011	9:32:50 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:32:50 PM	Tube furnace set to 1000
11/16/2011	9:50:50 PM	Helium valve closed
11/16/2011	9:50:50 PM	BCl3 valve closed
11/16/2011	9:50:50 PM	PH3 valve closed
11/16/2011	9:50:50 PM	SiCl4 pre valve closed
11/16/2011	9:50:50 PM	SiCl4 post valve closed
11/16/2011	9:50:50 PM	Main Vac valve closed
11/16/2011	9:50:50 PM	Bypass valve closed
11/16/2011	9:50:50 PM	H2 valve opened
11/16/2011	9:50:50 PM	Bubbler valve opened
11/16/2011	9:50:50 PM	Helium MFC set to  0.000000
11/16/2011	9:50:50 PM	H2 MFC set to  500.000000
11/16/2011	9:50:50 PM	BCl3 MFC set to  0.000000
11/16/2011	9:50:50 PM	PHl3 MFC set to  0.000000
11/16/2011	9:50:50 PM	SiCl4 MFC set to  0.000000
11/16/2011	9:50:50 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	9:50:51 PM	Tube furnace set to 750
11/16/2011	10:00:51 PM	H2 valve closed
11/16/2011	10:00:51 PM	BCl3 valve closed
11/16/2011	10:00:51 PM	PH3 valve closed
11/16/2011	10:00:51 PM	SiCl4 pre valve closed
11/16/2011	10:00:51 PM	SiCl4 post valve closed
11/16/2011	10:00:51 PM	Main Vac valve closed
11/16/2011	10:00:51 PM	Bypass valve closed
11/16/2011	10:00:51 PM	Helium valve opened
11/16/2011	10:00:51 PM	Bubbler valve opened
11/16/2011	10:00:51 PM	Helium MFC set to  400.000000
11/16/2011	10:00:51 PM	H2 MFC set to  0.000000
11/16/2011	10:00:51 PM	BCl3 MFC set to  0.000000
11/16/2011	10:00:51 PM	PHl3 MFC set to  0.000000
11/16/2011	10:00:51 PM	SiCl4 MFC set to  0.000000
11/16/2011	10:00:51 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:00:51 PM	Tube furnace set to 0
11/16/2011	10:18:23 PM	Run aborted at 10:18 PM
11/16/2011	10:18:23 PM	Helium valve closed
11/16/2011	10:18:23 PM	H2 valve closed
11/16/2011	10:18:23 PM	BCl3 valve closed
11/16/2011	10:18:23 PM	PH3 valve closed
11/16/2011	10:18:23 PM	SiCl4 pre valve closed
11/16/2011	10:18:23 PM	SiCl4 post valve closed
11/16/2011	10:18:23 PM	Bypass valve closed
11/16/2011	10:18:23 PM	Main Vac valve closed
11/16/2011	10:18:23 PM	Bubbler valve closed
11/16/2011	10:18:23 PM	Helium MFC set to  0.000000
11/16/2011	10:18:23 PM	H2 MFC set to  0.000000
11/16/2011	10:18:23 PM	BCl3 MFC set to  0.000000
11/16/2011	10:18:23 PM	PHl3 MFC set to  0.000000
11/16/2011	10:18:23 PM	SiCl4 MFC set to  0.000000
11/16/2011	10:18:23 PM	Tube furnace set to 0
11/16/2011	10:21:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	10:21:30 PM	Recipe started at 10:21 PM
11/16/2011	10:21:30 PM	Helium valve closed
11/16/2011	10:21:30 PM	H2 valve closed
11/16/2011	10:21:30 PM	BCl3 valve closed
11/16/2011	10:21:30 PM	PH3 valve closed
11/16/2011	10:21:30 PM	SiCl4 pre valve closed
11/16/2011	10:21:30 PM	SiCl4 post valve closed
11/16/2011	10:21:30 PM	Main Vac valve closed
11/16/2011	10:21:30 PM	Bubbler valve closed
11/16/2011	10:21:30 PM	Bypass valve opened
11/16/2011	10:21:30 PM	Helium MFC set to  0.000000
11/16/2011	10:21:30 PM	H2 MFC set to  0.000000
11/16/2011	10:21:30 PM	BCl3 MFC set to  0.000000
11/16/2011	10:21:30 PM	PHl3 MFC set to  0.000000
11/16/2011	10:21:30 PM	SiCl4 MFC set to  0.000000
11/16/2011	10:21:30 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:21:30 PM	Tube furnace set to 0
11/16/2011	10:23:04 PM	Helium valve closed
11/16/2011	10:23:04 PM	H2 valve closed
11/16/2011	10:23:04 PM	BCl3 valve closed
11/16/2011	10:23:04 PM	PH3 valve closed
11/16/2011	10:23:04 PM	SiCl4 pre valve closed
11/16/2011	10:23:04 PM	SiCl4 post valve closed
11/16/2011	10:23:04 PM	Main Vac valve closed
11/16/2011	10:23:04 PM	Bubbler valve closed
11/16/2011	10:23:04 PM	Bypass valve opened
11/16/2011	10:23:04 PM	Helium MFC set to  0.000000
11/16/2011	10:23:04 PM	H2 MFC set to  0.000000
11/16/2011	10:23:04 PM	BCl3 MFC set to  0.000000
11/16/2011	10:23:04 PM	PHl3 MFC set to  0.000000
11/16/2011	10:23:04 PM	SiCl4 MFC set to  0.000000
11/16/2011	10:23:04 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:23:04 PM	Tube furnace set to 0
11/16/2011	10:24:04 PM	Helium valve closed
11/16/2011	10:24:04 PM	H2 valve closed
11/16/2011	10:24:04 PM	BCl3 valve closed
11/16/2011	10:24:04 PM	PH3 valve closed
11/16/2011	10:24:04 PM	SiCl4 pre valve closed
11/16/2011	10:24:04 PM	SiCl4 post valve closed
11/16/2011	10:24:04 PM	Bypass valve closed
11/16/2011	10:24:04 PM	Bubbler valve closed
11/16/2011	10:24:04 PM	Main Vac valve opened
11/16/2011	10:24:04 PM	Helium MFC set to  0.000000
11/16/2011	10:24:04 PM	H2 MFC set to  0.000000
11/16/2011	10:24:04 PM	BCl3 MFC set to  0.000000
11/16/2011	10:24:04 PM	PHl3 MFC set to  0.000000
11/16/2011	10:24:04 PM	SiCl4 MFC set to  0.000000
11/16/2011	10:24:04 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	10:24:04 PM	Tube furnace set to 0
11/16/2011	10:24:05 PM	Run finished at 10:24 PM
11/16/2011	10:24:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/16/2011	11:06:54 PM	Helium MFC set to  20.000000
11/16/2011	11:06:55 PM	Helium valve opened
11/16/2011	11:07:22 PM	Helium valve closed
11/16/2011	11:14:33 PM	Main Vac valve closed
11/16/2011	11:15:07 PM	Main Vac valve opened
11/16/2011	11:19:02 PM	Main Vac valve closed
11/16/2011	11:19:30 PM	Main Vac valve opened
11/16/2011	11:19:32 PM	Helium valve opened
11/16/2011	11:20:26 PM	Helium valve closed
11/16/2011	11:20:28 PM	Helium MFC set to  0.000000
11/16/2011	11:21:42 PM	Main Vac valve closed
11/16/2011	11:22:58 PM	Main Vac valve opened
11/16/2011	11:23:29 PM	Helium MFC set to  20.000000
11/16/2011	11:23:30 PM	Helium valve opened
11/16/2011	11:24:02 PM	Helium valve closed
11/16/2011	11:24:05 PM	Helium MFC set to  0.000000
11/16/2011	11:24:50 PM	Recipe started at 11:24 PM
11/16/2011	11:24:50 PM	Helium valve closed
11/16/2011	11:24:50 PM	H2 valve closed
11/16/2011	11:24:50 PM	BCl3 valve closed
11/16/2011	11:24:50 PM	PH3 valve closed
11/16/2011	11:24:50 PM	SiCl4 pre valve closed
11/16/2011	11:24:50 PM	SiCl4 post valve closed
11/16/2011	11:24:50 PM	Main Vac valve closed
11/16/2011	11:24:50 PM	Bypass valve closed
11/16/2011	11:24:50 PM	Bubbler valve closed
11/16/2011	11:24:50 PM	Helium MFC set to  0.000000
11/16/2011	11:24:50 PM	H2 MFC set to  0.000000
11/16/2011	11:24:50 PM	BCl3 MFC set to  0.000000
11/16/2011	11:24:50 PM	PHl3 MFC set to  0.000000
11/16/2011	11:24:50 PM	SiCl4 MFC set to  0.000000
11/16/2011	11:24:50 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:24:51 PM	Tube furnace set to 0
11/16/2011	11:24:54 PM	Helium valve closed
11/16/2011	11:24:54 PM	BCl3 valve closed
11/16/2011	11:24:54 PM	PH3 valve closed
11/16/2011	11:24:54 PM	SiCl4 pre valve closed
11/16/2011	11:24:54 PM	SiCl4 post valve closed
11/16/2011	11:24:54 PM	Main Vac valve closed
11/16/2011	11:24:54 PM	Bypass valve closed
11/16/2011	11:24:54 PM	Bubbler valve closed
11/16/2011	11:24:54 PM	H2 valve opened
11/16/2011	11:24:54 PM	Helium MFC set to  0.000000
11/16/2011	11:24:54 PM	H2 MFC set to  500.000000
11/16/2011	11:24:54 PM	BCl3 MFC set to  0.000000
11/16/2011	11:24:54 PM	PHl3 MFC set to  0.000000
11/16/2011	11:24:54 PM	SiCl4 MFC set to  0.000000
11/16/2011	11:24:54 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:24:54 PM	Tube furnace set to 50
11/16/2011	11:26:00 PM	Helium valve closed
11/16/2011	11:26:00 PM	BCl3 valve closed
11/16/2011	11:26:00 PM	PH3 valve closed
11/16/2011	11:26:00 PM	SiCl4 pre valve closed
11/16/2011	11:26:00 PM	SiCl4 post valve closed
11/16/2011	11:26:00 PM	Main Vac valve closed
11/16/2011	11:26:00 PM	Bypass valve closed
11/16/2011	11:26:00 PM	H2 valve opened
11/16/2011	11:26:00 PM	Bubbler valve opened
11/16/2011	11:26:00 PM	Helium MFC set to  0.000000
11/16/2011	11:26:00 PM	H2 MFC set to  500.000000
11/16/2011	11:26:00 PM	BCl3 MFC set to  0.000000
11/16/2011	11:26:00 PM	PHl3 MFC set to  0.000000
11/16/2011	11:26:00 PM	SiCl4 MFC set to  0.000000
11/16/2011	11:26:00 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:26:00 PM	Tube furnace set to 50
11/16/2011	11:26:01 PM	Helium valve closed
11/16/2011	11:26:01 PM	BCl3 valve closed
11/16/2011	11:26:01 PM	PH3 valve closed
11/16/2011	11:26:01 PM	SiCl4 pre valve closed
11/16/2011	11:26:01 PM	SiCl4 post valve closed
11/16/2011	11:26:01 PM	Main Vac valve closed
11/16/2011	11:26:01 PM	Bypass valve closed
11/16/2011	11:26:01 PM	H2 valve opened
11/16/2011	11:26:01 PM	Bubbler valve opened
11/16/2011	11:26:01 PM	Helium MFC set to  0.000000
11/16/2011	11:26:01 PM	H2 MFC set to  450.000000
11/16/2011	11:26:01 PM	BCl3 MFC set to  0.000000
11/16/2011	11:26:01 PM	PHl3 MFC set to  0.000000
11/16/2011	11:26:01 PM	SiCl4 MFC set to  0.000000
11/16/2011	11:26:01 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:26:01 PM	Tube furnace set to 1000
11/16/2011	11:49:01 PM	Helium valve closed
11/16/2011	11:49:01 PM	PH3 valve closed
11/16/2011	11:49:01 PM	Main Vac valve closed
11/16/2011	11:49:01 PM	Bypass valve closed
11/16/2011	11:49:01 PM	H2 valve opened
11/16/2011	11:49:01 PM	BCl3 valve opened
11/16/2011	11:49:01 PM	SiCl4 pre valve opened
11/16/2011	11:49:01 PM	SiCl4 post valve opened
11/16/2011	11:49:01 PM	Bubbler valve opened
11/16/2011	11:49:01 PM	Helium MFC set to  0.000000
11/16/2011	11:49:01 PM	H2 MFC set to  500.000000
11/16/2011	11:49:01 PM	BCl3 MFC set to  0.900000
11/16/2011	11:49:01 PM	PHl3 MFC set to  0.000000
11/16/2011	11:49:01 PM	SiCl4 MFC set to  25.000000
11/16/2011	11:49:01 PM	Bypass solenoid MFC set to  0.000000
11/16/2011	11:49:01 PM	Tube furnace set to 1000
